Corrosion-life prediction model for 316L stainless steel under electronic special gases containing trace moisture employed in semiconductor manufacturing industry
Zhice Yang, Chaoran Ma, Yuxin Zhang, Zhuoyang Du, Peng Zhou, Yang Zhao, Tao Zhang, Fuhui Wang
Topics & Concepts
CorrosionMoistureMetallurgyMaterials scienceTRACE (psycholinguistics)SemiconductorSemiconductor industryComposite materialEngineeringOptoelectronicsManufacturing engineeringPhilosophyLinguisticsHydrogen embrittlement and corrosion behaviors in metalsCorrosion Behavior and InhibitionHigh-Temperature Coating Behaviors