Application of Bayesian optimization for high-performance TiO /SiO /c-Si passivating contact
Shinsuke Miyagawa, Kazuhiro Gotoh, Kentaro Kutsukake, Yasuyoshi Kurokawa, Noritaka Usami
Topics & Concepts
PassivationBayesian optimizationProcess optimizationMaterials scienceAtomic layer depositionSiliconDeposition (geology)FabricationOxideSaturation currentChemical vapor depositionContact resistanceNanotechnologyLayer (electronics)Chemical engineeringOptoelectronicsComputer scienceMetallurgyMachine learningElectrical engineeringPathologyMedicineAlternative medicinePaleontologyVoltageEngineeringBiologySedimentSilicon and Solar Cell TechnologiesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis