Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio
Zhongliang Deng, Chengqi Lai, Jiali Zhou, Yucheng Wang
Topics & Concepts
CapacitanceCapacitive sensingMaterials scienceMicroelectromechanical systemsVoltageOptoelectronicsElectrical engineeringDielectricInsertion lossElectrodeEngineeringPhysicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies