Microstructural, mechanical and optical properties of tungsten oxide coatings fabricated using superimposed HiPIMS-MF systems
Igamcha Moirangthem, Shih-Hsun Chen, Bih‐Show Lou, Jyh‐Wei Lee
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceThin filmAnalytical Chemistry (journal)Nanocrystalline materialVolumetric flow rateOxygenStoichiometrySputter depositionSputteringNanotechnologyChemistryQuantum mechanicsPhysicsOrganic chemistryChromatographyMetal and Thin Film MechanicsZnO doping and propertiesGas Sensing Nanomaterials and Sensors