Noble gas control of diamond-like content and compressive stress in carbon films by arc-mixed mode high power impulse magnetron sputtering
Behnam Akhavan, Rajesh Ganesan, D.T.A. Matthews, David R. McKenzie, Marcela Bilek
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputteringArgonNeonSputter depositionDiamond-like carbonAnalytical Chemistry (journal)Inert gasDiamondNoble gasPhysical vapor depositionElectric arcComposite materialThin filmAtomic physicsNanotechnologyCoatingChemistryElectrodePhysicsChromatographyPhysical chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices