High-rate growth of gallium oxide films by plasma-enhanced thermal oxidation for solar-blind photodetectors
Tong Su, Bohan Xiao, Zikang Ai, Lingjie Bao, Wencheng Chen, Yuheng Shen, Qijin Cheng, Kostya Ostrikov
Topics & Concepts
Thin filmChemical vapor depositionMaterials scienceThermal oxidationGalliumOxideSolar cellPlasmaMolecular beam epitaxyOptoelectronicsSurface roughnessAnalytical Chemistry (journal)Chemical engineeringEpitaxyNanotechnologyChemistryComposite materialMetallurgyQuantum mechanicsEngineeringPhysicsChromatographyLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques