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Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing

Chia-Yu Hsu, Wei‐Chen Liu

2020Journal of Intelligent Manufacturing155 citationsDOI

Topics & Concepts

Fault (geology)Convolutional neural networkSemiconductor device fabricationComputer scienceData miningArtificial intelligenceFault detection and isolationPoolingFeature (linguistics)Time seriesPattern recognition (psychology)EngineeringMachine learningWaferGeologySeismologyActuatorLinguisticsElectrical engineeringPhilosophyTime Series Analysis and ForecastingAnomaly Detection Techniques and ApplicationsCurrency Recognition and Detection
Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing | Litcius