Target properties optimization on capacitive-type humidity sensor: Ingredients hybrid and integrated passive devices fabrication
He Yu, Jun‐Ge Liang, Cong Wang, Chengcai Liu, Bing Bai, Fan‐Yi Meng, Dan-Qing Zou, Luqman Ali, Changqiang Jing, Meng Zhao, Lei Wang, Xiaofeng Gu
Topics & Concepts
Materials scienceFabricationRelative humidityPolyacrylonitrileReliability (semiconductor)CoatingHysteresisHumidityRaw materialProcess engineeringOptoelectronicsNanotechnologyComposite materialChemistryPolymerMedicineOrganic chemistryQuantum mechanicsThermodynamicsEngineeringPower (physics)PathologyPhysicsAlternative medicineGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Sensor and Energy Harvesting Materials