Approaches to defect characterization, mitigation and reduction
Wei‐Tsu Tseng
Topics & Concepts
ConsumablesChemical-mechanical planarizationShallow trench isolationMaterials scienceIntegrated circuitCharacterization (materials science)Reliability (semiconductor)TrenchNanotechnologyOptoelectronicsEngineering physicsEngineeringLayer (electronics)PhysicsMarketingPower (physics)BusinessQuantum mechanicsAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisSemiconductor materials and devices