Stabilizing near-field acoustic levitation: Investigation of non-linear restoring force generated by asymmetric gas squeeze film
Yuanyuan Liu, Minghui Shi, Kai Feng, K. Sepahvand, Steffen Marburg
Abstract
The instability of a floating object is the main factor preventing near-field acoustic levitation (NAFL) from being widely used in the manufacture of micro-electro-mechanical systems. Therefore, investigating the restoring force due to the generation mechanisms of NAFL is necessary to ensure the stable levitation of the floating object. This study presents a theoretical analysis to evaluate the restoring force based on the gas-film-lubrication theory. The gas-film pressure between the reflector and the radiator is expressed in the form of the dimensionless Reynolds equation in a cylindrical coordinate system, which is solved by an eight-point discrete grid method due to the discontinuous gas-film distribution. An experimental rig is constructed to measure the restoring force at various eccentricities, which can be used to support the developed numerical model. The theoretical results show that the restoring force increases with an increment in eccentricity, which agrees with experimental results. Furthermore, theoretical prediction results indicate that the restoring force increases when the amplitude of the radiator and weight of the levitator increases, which indicates higher system stability. The results of the radiator vibration mode on the restoring force show that the restoring force is the largest in the first-order mode.