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Effect of plasma nitriding substrate current density on the adhesion strength of <i>in situ</i> PVD TiN coatings

Xin Zhang, Xiubo Tian, Chunzhi Gong, Xiangli Liu, Jin Li

2023Journal of Vacuum Science & Technology A Vacuum Surfaces and Films10 citationsDOI

Abstract

TiN coatings were in situ deposited on un-nitrided and nitrided M2 high speed steels by electrically enhanced cathodic arc evaporation technology. The morphology, microstructure, phase composition, as well as microhardness and nano-hardness of the samples were analyzed by scanning electron microscope, optical microscope, X-ray diffraction, Vickers hardness tester, and nano-indentation, respectively. In especially, the effect of nitriding substrate current density on the adhesion strength of in situ TiN coatings was investigated by Rockwell indentation and scratch tests. The results showed that the nitrided layer thickness increased with increasing substrate current density and “bright” nitrided layer was achieved. In the Rockwell indentation test, the radial cracks on the surface of the duplex-treated samples originated from the hard and brittle nitrided layer as compared to the nitrided substrate, which corresponded to the failure mechanism of brittle fracture. In the scratch test, the adhesion strength of coating to substrates was significantly improved by nitriding pretreatment. Furthermore, the critical load of the duplex-treated samples increased with the increase of nitriding substrate current density. In addition, tensile cracks only occurred in the case of the N120/TiN sample.

Topics & Concepts

NitridingMaterials scienceIndentation hardnessMetallurgyIndentationTinRockwell scaleScanning electron microscopeComposite materialLayer (electronics)MicrostructureBrittlenessSubstrate (aquarium)GeologyOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials
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