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Temperature Dependence of Ultrathin Mixed-Phase Ga<sub>2</sub>O<sub>3</sub>Films Grown on the α-Al<sub>2</sub>O<sub>3</sub>Substrate via Mist-CVD

Abhay Kumar Mondal, Loh Kean Ping, Muhammad Aniq Shazni Mohammad Haniff, Mohd Arif Mohd Sarjidan, Boon Tong Goh, Mohd Ambri Mohamed

2022ACS Omega32 citationsDOIOpen Access PDF

Abstract

ultrathin film can have great potential in developing future high-power electronic devices.

Topics & Concepts

Materials scienceBand gapChemical vapor depositionSemiconductorSubstrate (aquarium)Thin filmGalliumOptoelectronicsMistNanotechnologyMetallurgyPhysicsGeologyMeteorologyOceanographyGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Temperature Dependence of Ultrathin Mixed-Phase Ga<sub>2</sub>O<sub>3</sub>Films Grown on the α-Al<sub>2</sub>O<sub>3</sub>Substrate via Mist-CVD | Litcius