Litcius/Paper detail

Focused ion beam milling for prototyping 2D and 3D photonic structures

Karen Sloyan, Henrik Melkonyan, Marcus S. Dahlem

2020The International Journal of Advanced Manufacturing Technology18 citationsDOI

Topics & Concepts

Focused ion beamMaterials scienceFabricationNanotechnologyRapid prototypingElectrical conductorPhotonicsSubstrate (aquarium)Nanostructure3D printingOptoelectronicsIonComposite materialOceanographyQuantum mechanicsAlternative medicinePathologyPhysicsGeologyMedicineIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing TechniquesOptical Coatings and Gratings
Focused ion beam milling for prototyping 2D and 3D photonic structures | Litcius