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Epitaxial growth of γ-(AlxGa1-x)2O3 alloy thin films on spinel substrates via mist chemical vapor deposition

Ryuto Horie, Hiroyuki Nishinaka, Daisuke Tahara, Masahiro Yoshimoto

2020Journal of Alloys and Compounds23 citationsDOI

Topics & Concepts

SpinelMaterials scienceEpitaxyBand gapThin filmGalliumAlloyElectron diffractionChemical vapor depositionLattice constantOptoelectronicsOxideAnalytical Chemistry (journal)DiffractionOpticsNanotechnologyMetallurgyChemistryPhysicsChromatographyLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Epitaxial growth of γ-(AlxGa1-x)2O3 alloy thin films on spinel substrates via mist chemical vapor deposition | Litcius