A Simulation Study on Large-Area Inductively Coupled Plasma for Uniformity Optimization
Eui-Jeong Son, Sung Hwan Cho, Ho-Jun Lee
Topics & Concepts
Aspect ratio (aeronautics)WaferPlasmaInductively coupled plasmaRADIUSMaterials scienceElectromagnetic coilElectron densitySurface-area-to-volume ratioDiffusionElectronElectron temperatureAnalytical Chemistry (journal)Computational physicsAtomic physicsChemistryOptoelectronicsPhysicsElectrical engineeringThermodynamicsEngineeringNuclear physicsComputer securityComputer scienceChromatographyPlasma Diagnostics and ApplicationsMetal and Thin Film MechanicsCopper Interconnects and Reliability