Laser dicing of semiconductor wafers: Research status and current challenges
He Cao, Yunfei Li, Gong Wang, Ziqi Tang, Derong Sun, Hongwei Yin, Yu Yu, Chengbin Shen, Yulei Wang, Zhiwei Lü
Topics & Concepts
Wafer dicingWaferCurrent (fluid)Materials scienceLaserSemiconductorOptoelectronicsEngineering physicsSemiconductor laser theoryComputer scienceOpticsElectrical engineeringEngineeringPhysicsLaser Material Processing TechniquesIntegrated Circuits and Semiconductor Failure AnalysisAdvanced Surface Polishing Techniques