Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition
Yichi Zhang, Yangyao Ding, Panagiotis D. Christofides
Topics & Concepts
Atomic layer depositionKinetic Monte CarloMultiscale modelingDeposition (geology)PlasmaMaterials scienceComputer scienceComputational fluid dynamicsNanotechnologyThin filmOptoelectronicsMonte Carlo methodChemistryPhysicsMechanicsBiologyPaleontologyComputational chemistrySedimentMathematicsQuantum mechanicsStatisticsSemiconductor materials and devicesCatalytic Processes in Materials ScienceAdvanced Data Storage Technologies