AFM tip-based fabrication of silicon nanostructures with reduced subsurface amorphous layers
Jinyan Tang, Zhongwei Li, Bing‐Feng Ju, Yuan-Liu Chen
Topics & Concepts
Materials scienceFabricationNanostructureNanotechnologyAmorphous siliconSiliconAmorphous solidAtomic force microscopyOptoelectronicsCrystalline siliconCrystallographyChemistryPathologyMedicineAlternative medicineAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsNanofabrication and Lithography Techniques