Oxygen-termination effect on the surface energy dissipation in diamond MEMS
Keyun Gu, Zilong Zhang, Guo Chen, Jian Huang, Yasuo Koide, Satoshi Koizumi, Wen Zhao, Meiyong Liao
Topics & Concepts
DissipationOxygenDiamondMicroelectromechanical systemsMaterials scienceSurface (topology)Surface energyNanotechnologyChemical engineeringComposite materialChemistryThermodynamicsPhysicsGeometryMathematicsOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and ApplicationsMechanical and Optical Resonators