Low power consumption and high resolution 1280X960 Gate Assisted Photonic Demodulator pixel for indirect Time of flight
Y. Ebiko, H. Yamagishi, Keiji Tatani, Hayato Iwamoto, Yusuke Moriyama, Yoshiaki Hagiwara, Shunji Maeda, T. Murase, Taisuke Suwa, Hiroyuki Arai, Yuji Isogai, Sohta Hida, Suguru Kameda, Tsubasa Terada, K. Koiso, F.T. Brady, Sang‐Kook Han, Adarsh Basavalingappa, T. Michiel, T. Ueno
Abstract
A 1280×960 floating diffusion storage global shutter image sensor is implemented in a 3D stacked back illuminated indirect time of flight sensor (iToF). The sensor, achieves 18,000e- full well capacity and 32% quantum efficiency (QE) with a pyramid surface for diffraction (PSD) structure [1], utilizing a 3.5µm pixel. Low power consumption is also achieved, due to low leakage current for the iToF pixel and low resistance Cu-Cu connection metal wiring. These device architectures enable high resolution and wide dynamic range 3D depth sensing for both near and far objects.