Kinetics and mechanisms of stress relaxation in sputtered silver thin films
Quentin Hérault, Iryna Gozhyk, Matteo Balestrieri, Hervé Montigaud, Sergey Grachev, Rémi Lazzari
Topics & Concepts
Materials scienceStress relaxationThin filmSputter depositionRelaxation (psychology)Grain boundaryStress (linguistics)DiffusionSputteringWaferCrystalliteGrain boundary diffusion coefficientComposite materialSurface diffusionDeposition (geology)Physical vapor depositionCondensed matter physicsMetallurgyThermodynamicsNanotechnologyCreepMicrostructurePhysical chemistryChemistryPhysicsPaleontologyAdsorptionBiologySocial psychologyLinguisticsSedimentPhilosophyPsychologyCopper Interconnects and ReliabilityFluid Dynamics and Thin Filmsnanoparticles nucleation surface interactions