The study on corrosion inhibition effect of 3-amino-1, 2, 4-triazole and benzotriazole on molybdenum for barrier layer slurry
Pengfei Wu, Qiang Wang, Wei Li, Jinbo Ji, Kai Zhang, Zhongchen Ma, Shengli Wang, Chenwei Wang
Topics & Concepts
BenzotriazolePassivationCorrosionMolybdenumMaterials scienceAdsorptionScanning electron microscopeEtching (microfabrication)Chemical-mechanical planarizationMetalChemical engineeringIsotropic etchingLayer (electronics)MetallurgyChemistryComposite materialPhysical chemistryEngineeringCorrosion Behavior and InhibitionAdvanced Surface Polishing TechniquesAdvanced materials and composites