Dual-axis STEM tomography at 200 kV: Setup, performance, limitations
Reinhard Rachel, Paul Walther, Christine Maaßen, I. Daberkow, Masahiro Matsuoka, Ralph Witzgall
Topics & Concepts
Electron tomographyCondenser (optics)TomographyMicroscopeOpticsMaterials scienceScanning transmission electron microscopyReliability (semiconductor)Transmission electron microscopyDual (grammatical number)Aperture (computer memory)Electron microscopeNanotechnologyPhysicsAcousticsPower (physics)Light sourceQuantum mechanicsArtLiteratureAdvanced Electron Microscopy Techniques and ApplicationsElectron and X-Ray Spectroscopy TechniquesIntegrated Circuits and Semiconductor Failure Analysis