Deterministic control of material removal distribution to converge surface figure in full-aperture polishing
Defeng Liao, Feihu Zhang, Ruiqing Xie, Shijie Zhao, Jian Wang, Qiao Xu
Topics & Concepts
PolishingAperture (computer memory)Materials scienceSurface (topology)Chemical-mechanical planarizationOpticsProcess (computing)Engineering drawingMechanical engineeringMechanicsComputer scienceGeometryComposite materialPhysicsMathematicsEngineeringOperating systemAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques