Ultrafast-response H2S MEMS gas sensor based on double phase In2O3 monolayer particle film
Yanlin Zhang, Zheng Zhang, Guoliang Lv, Yu Zhang, Jintao Chen, Yuanyuan Luo, Guotao Duan
Topics & Concepts
Ultrashort pulseMonolayerMicroelectromechanical systemsMaterials scienceParticle (ecology)OptoelectronicsPhase (matter)NanotechnologyOpticsChemistryPhysicsOrganic chemistryGeologyLaserOceanographyGas Sensing Nanomaterials and SensorsAdvanced Chemical Sensor TechnologiesAnalytical Chemistry and Sensors