Reprint of: A MACEing silicon: Towards single-step etching of defined porous nanostructures for biomedicine
Hashim Alhmoud, D. Brodoceanu, Roey Elnathan, Tobias Kraus, Nicolas H. Voelcker
Topics & Concepts
Materials scienceNanotechnologyNanopillarPorous siliconEtching (microfabrication)SiliconNanostructureIsotropic etchingNanowireOptoelectronicsLayer (electronics)Nanowire Synthesis and ApplicationsSilicon Nanostructures and PhotoluminescenceAnodic Oxide Films and Nanostructures