Explainable prediction of deposited film thickness in IC fabrication with CatBoost and SHapley Additive exPlanations (SHAP) models
Yumeng Shi, Yu‐Dong Cai, Shunyuan Lou, Yining Chen
Topics & Concepts
Gradient boostingComputer scienceRandom forestMean squared errorArtificial intelligenceMachine learningFeature selectionBoosting (machine learning)Mean absolute percentage errorFused deposition modelingFeature engineeringCategorical variablePredictive modellingLasso (programming language)Feature (linguistics)AlgorithmDeep learningStatisticsMathematicsMaterials science3D printingArtificial neural networkComposite materialPhilosophyWorld Wide WebLinguisticsIndustrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesMachine Learning and Data Classification