Investigation of optoelectronic properties of tin-doped indium oxide thin films and contact resistivity with silver film: Role of oxygen concentration variation during sputter deposition
S. U. Alam, Ashutosh Pandey, Shrestha Bhattacharya, Sourav Mandal, Vamsi K. Komarala
Topics & Concepts
Thin filmMaterials scienceIndium tin oxideElectrical resistivity and conductivitySputteringIndiumDopingDeposition (geology)OptoelectronicsOxideTin oxideOxygenTinAnalytical Chemistry (journal)NanotechnologyMetallurgyChemistryElectrical engineeringBiologyPaleontologyEngineeringChromatographyOrganic chemistrySedimentZnO doping and propertiesThin-Film Transistor TechnologiesGas Sensing Nanomaterials and Sensors