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Flexible Solar-Blind Photodetectors Based on β-GaO Films Transferred by a Stamp-Based Printing Technique<sub/> <sub/>

Xin Zhou, Ming Li, Jinzhong Zhang, Liyan Shang, Kai Jiang, Yawei Li, Liangqing Zhu, Junhao Chu, Zhigao Hu

2022IEEE Electron Device Letters16 citationsDOI

Abstract

A stamp-based printing technique was applied to transfer the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\beta $ </tex-math></inline-formula> -Ga <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{{2}}\text{O}_{{3}}$ </tex-math></inline-formula> films grown by pulsed laser deposition (PLD) from Si substrates onto some flexible substrates, such as PET, PEN, and PI. It is demonstrated that the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\beta $ </tex-math></inline-formula> -Ga <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{{2}}\text{O}_{{3}}$ </tex-math></inline-formula> -based flexible solar-blind photodetectors (SBPDs) exhibit brilliant optoelectrical performances with a low dark current of 1.7pA at 10V, a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{I}_{ {254} \text {nm}}/\text{I}_{ \text {dark}}$ </tex-math></inline-formula> ratio of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${1.2} \times {10}^{{3}}$ </tex-math></inline-formula> , rise ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\tau _{r\,{1}}$ </tex-math></inline-formula> =0.079s and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\tau _{r\,{2}}$ </tex-math></inline-formula> =0.413s) and decay ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\tau _{d\,{1}}$ </tex-math></inline-formula> =0.029s and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\tau _{d\,{2}}$ </tex-math></inline-formula> =0.316s) times. In a further step, flexible imaging sensor arrays based on the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\beta $ </tex-math></inline-formula> -Ga <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{{2}}\text{O}_{{3}}$ </tex-math></inline-formula> /PET were fabricated, which exhibit good imaging capability and resolution. Moreover, wearable UVC-alarms based on the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\beta $ </tex-math></inline-formula> -Ga <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$_{{2}}\text{O}_{{3}}$ </tex-math></inline-formula> /PET were realized to monitor the UVC radiation in the environment in real time, which can be used in the COVID-19-related area.

Topics & Concepts

NotationMathematicsAlgorithmArithmeticGa2O3 and related materialsZnO doping and propertiesGaN-based semiconductor devices and materials