Virtual experiments of Czochralski growth of silicon using machine learning: Influence of processing parameters on interstitial oxygen concentration
Kentaro Kutsukake, Yuta Nagai, H. Banba
Topics & Concepts
Crucible (geodemography)IngotRotation (mathematics)Volumetric flow rateSiliconProcess (computing)Crystal (programming language)Geodetic datumMaterials scienceArtificial intelligenceComputer scienceChemistryMechanicsMetallurgyPhysicsGeologyComputational chemistryProgramming languageAlloyGeodesyOperating systemSilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence