A Low-Cost Fabrication and Numerical Simulation of a MEMS Acoustic Transducer Using Polyimide Membrane on FR4 Substrate
Kaliaperumal Karthikeyan, L. Sujatha, R. Sundar
Topics & Concepts
Microelectromechanical systemsMaterials scienceResistorWheatstone bridgeTransducerFabricationPolyimideSilicon nitrideSiliconPressure sensorOptoelectronicsTransductorPiezoelectricityDiaphragm (acoustics)AcousticsComposite materialElectrical engineeringMechanical engineeringEngineeringVibrationLayer (electronics)PhysicsPathologyAlternative medicineMedicineVoltageAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting Materials