Design and optimization of a novel capacitive six-axis force/torque sensor based on sensitivity isotropy
Minghui Pu, Quan Liang, Qi Luo, Jinhao Zhang, Rendong Zhao, Zhenjun Ai, Fei Su
Topics & Concepts
IsotropySensitivity (control systems)Capacitive sensingTorqueCapacitanceCapacitorFinite element methodControl theory (sociology)EngineeringPhysicsElectronic engineeringComputer scienceVoltageStructural engineeringElectrical engineeringOpticsControl (management)Artificial intelligenceThermodynamicsElectrodeQuantum mechanicsAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and ApplicationsPiezoelectric Actuators and Control