Plasma-enhanced chemical vapor deposition Ta<sub>3</sub>N<sub>5</sub> synthesis leading to high current density during PEC oxygen evolution
Ela Nurlaela, Mamiko Nakabayashi, Yuji Kobayashi, Naoya Shibata, Taro Yamada, Kazunari Domen
Abstract
The plasma CVD method brought about a Ta<sub>3</sub>N<sub>5</sub> dual layer structure, recording a high photoelectrochemical O<sub>2</sub> evolution current under sunlight irradiation.
Topics & Concepts
Chemical vapor depositionOxygenPlasmaDeposition (geology)Current (fluid)Current densityMaterials scienceAnalytical Chemistry (journal)Chemical engineeringChemistryEnvironmental chemistryNanotechnologyThermodynamicsOrganic chemistryPhysicsBiologyQuantum mechanicsPaleontologySedimentEngineeringAdvanced Photocatalysis TechniquesSemiconductor materials and devicesElectronic and Structural Properties of Oxides