Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator
Antanas Butkus, Edvinas Skliutas, Darius Gailevičius, Mangirdas Malinauskas
Topics & Concepts
FemtosecondMaterials scienceLithographyNano-LaserOptoelectronicsOpticsMaskless lithographyNanotechnologyElectron-beam lithographyResistComposite materialPhysicsLayer (electronics)Nonlinear Optical Materials StudiesNanofabrication and Lithography TechniquesLaser Material Processing Techniques