Sensitive pressure sensors based on conductive microstructured air-gap gates and two-dimensional semiconductor transistors
Yun-Chiao Huang, Yuan Liu, Chao Ma, Hung‐Chieh Cheng, Qiyuan He, Hao Wu, Chen Wang, Cheng-Yi Lin, Yu Huang, Xiangfeng Duan, Yu Huang, Xiangfeng Duan
Topics & Concepts
TransistorMaterials scienceSensitivity (control systems)Pressure sensorOptoelectronicsSemiconductorAir gap (plumbing)Capacitive sensingPressure measurementSemiconductor deviceElectrical engineeringElectronic engineeringNanotechnologyVoltageEngineeringMechanical engineeringLayer (electronics)Composite materialAdvanced Sensor and Energy Harvesting MaterialsGas Sensing Nanomaterials and SensorsMechanical and Optical Resonators