Effect of substrate temperature and preferred orientation on the tribological properties of Tantalum nitride coatings
J. Jenis Samuel, P. Krishna Kumar, D. Dinesh Kumar, A.M. Kamalan Kirubaharan, T. Arjun Raj, P. Aravind
Topics & Concepts
Materials scienceTribologyTantalum nitrideCrystalliteTantalumScanning electron microscopeSputter depositionCoatingSubstrate (aquarium)Composite materialTribometerNitridePhase (matter)MetallurgyLayer (electronics)SputteringThin filmNanotechnologyOrganic chemistryChemistryOceanographyGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research