Three-dimensional nanolithography guided by DNA modular epitaxy
Jie Shen, Wei Sun, Di Liu, Thomas E. Schaus, Peng Yin
Topics & Concepts
NanomanufacturingNanolithographyLithographyMaterials scienceNanotechnologyEtching (microfabrication)Critical dimensionSubstrate (aquarium)Multiple patterningModular designOptoelectronicsFabricationResistOpticsComputer sciencePhysicsLayer (electronics)OceanographyMedicineAlternative medicineOperating systemPathologyGeologyAdvanced biosensing and bioanalysis techniquesNanofabrication and Lithography TechniquesRNA Interference and Gene Delivery