Material removal mechanism of multi-layer metal-film nanomilling
Yongda Yan, Jiqiang Wang, Yanquan Geng, Guoxiong Zhang
Topics & Concepts
Raman scatteringMaterials scienceLayer (electronics)FabricationSubstrate (aquarium)PlasmonRaman spectroscopyNanotechnologyAtomic force microscopyMetalOptoelectronicsOpticsMetallurgyPhysicsOceanographyMedicineAlternative medicinePathologyGeologyAdvanced Surface Polishing TechniquesNear-Field Optical MicroscopyNanofabrication and Lithography Techniques