Litcius/Paper detail

Material removal mechanism of multi-layer metal-film nanomilling

Yongda Yan, Jiqiang Wang, Yanquan Geng, Guoxiong Zhang

2022CIRP Annals32 citationsDOI

Topics & Concepts

Raman scatteringMaterials scienceLayer (electronics)FabricationSubstrate (aquarium)PlasmonRaman spectroscopyNanotechnologyAtomic force microscopyMetalOptoelectronicsOpticsMetallurgyPhysicsOceanographyMedicineAlternative medicinePathologyGeologyAdvanced Surface Polishing TechniquesNear-Field Optical MicroscopyNanofabrication and Lithography Techniques