The evolution of irradiation defects and hardening of CVD-SiC induced by He ions irradiation at 800°C
Qiqi Li, Xiaoyue Li, Zhenbo Zhu, Xiangbin Ding, Min Liu
Topics & Concepts
IrradiationHardening (computing)Materials scienceIonRadiochemistryMetallurgyComposite materialChemistryNuclear physicsPhysicsOrganic chemistryLayer (electronics)Advanced ceramic materials synthesisMetal and Thin Film MechanicsIntegrated Circuits and Semiconductor Failure Analysis