Oxygen concentration dependence of as-grown defect formation in nitrogen-doped Czochralski silicon single crystals
Kaoru Kajiwara, Kazuhisa Torigoe, Kazuhiro Harada, Masataka Hourai, Shin–ichi Nishizawa
Topics & Concepts
SiliconNitrogenWaferDopingOxygenMaterials scienceAnalytical Chemistry (journal)Crystal (programming language)DislocationImpurityCrystallographyChemistryNanotechnologyOptoelectronicsComposite materialComputer scienceOrganic chemistryProgramming languageChromatographyThin-Film Transistor TechnologiesSilicon and Solar Cell TechnologiesSilicon Nanostructures and Photoluminescence