Low-Energy Ion Irradiation of Materials
B. Rauschenbach
Topics & Concepts
IrradiationSputteringIonNanostructureMaterials scienceLow energyEnergy (signal processing)NanotechnologyEngineering physicsAtomic physicsChemistryPhysicsNuclear physicsThin filmOrganic chemistryQuantum mechanicsIon-surface interactions and analysisMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research