Deep reactive ion etching
Franz Laermer, Sami Franssila, Lauri Sainiemi, Kai Kolari
Topics & Concepts
Deep reactive-ion etchingWaferReactive-ion etchingEtching (microfabrication)Materials scienceNotchingSiliconOptoelectronicsNanotechnologyMetallurgyLayer (electronics)Plasma Diagnostics and ApplicationsSemiconductor materials and devicesAdvanced Surface Polishing Techniques