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Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

Ru Zhang, Chuanzhen Huang, Jun Wang, Shaochuan Feng, Hongtao Zhu

2020Materials Science in Semiconductor Processing66 citationsDOI

Topics & Concepts

Materials scienceFluenceLaserFemtosecondLaser ablationNano-IrradiationOpticsAblationSiliconPolarization (electrochemistry)Laser scanningOptoelectronicsComposite materialNuclear physicsAerospace engineeringChemistryEngineeringPhysicsPhysical chemistryLaser Material Processing TechniquesDiamond and Carbon-based Materials ResearchLaser-induced spectroscopy and plasma
Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation | Litcius