A 5.3 GHz Al<sub>0.76</sub>Sc<sub>0.24</sub>N Two-Dimensional Resonant Rods Resonator With a k<sub>t</sub><sup>2</sup> of 23.9%
Xuanyi Zhao, Onurcan Kaya, Michele Pirro, Meruyert Assylbekova, Luca Colombo, Pietro Simeoni, Cristian Cassella
Abstract
This work reports on the measured performance of an Aluminum Scandium Nitride (AlScN) Two-Dimensional Resonant Rods resonator (2DRR), fabricated by using a Sc-doping concentration of <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">24%</i> , characterized by a low off-resonance impedance ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">25</i> <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\Omega $ </tex-math></inline-formula> ) and exhibiting a record electromechanical coupling coefficient ( <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${k}_{t}^{\textit {2}}$ </tex-math></inline-formula> ) of <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">23.9%</i> for AlScN resonators. In order to achieve such performance, we identified and relied on optimized deposition and etching processes for highly-doped AlScN films, aiming at achieving high crystalline quality, low density of abnormally oriented grains in the 2DRR’s active region and sharp lateral sidewalls. Also, the 2DRR’s unit-cell has been acoustically engineered to maximize the piezo-generated mechanical energy within each rod and to ensure a low transduction of spurious modes around resonance. Due to its unprecedented <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${k}_{t}^{\textit {2}}$ </tex-math></inline-formula> , the reported 2DRR opens exciting scenarios towards the development of next generation monolithic integrated radio-frequency (RF) filtering components. In fact, we show that <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$5^{th}$ </tex-math></inline-formula> -order 2DRR-based ladder filters with fractional bandwidths (BW) of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">11%</i> , insertion-loss (I.L) values of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\sim $ </tex-math></inline-formula> <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2.5 dB</i> and with <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$>$ </tex-math></inline-formula> <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">30 dB</i> out-of-band rejections can now be envisioned, paving an unprecedented path towards the development of ultra-wide band (UWB) filters for next-generation Super-High-Frequency (SHF) radio front-ends. [2022-0024]