Anchor loss improvement in hemispherical resonators with ion beams
Youhuan Ning, Changhong Wang, Wei Cheng, Zhen Tian
Topics & Concepts
ResonatorMaterials scienceIonStructural engineeringOpticsAcousticsEngineeringPhysicsOptoelectronicsQuantum mechanicsParticle accelerators and beam dynamicsGyrotron and Vacuum Electronics ResearchAdvanced MEMS and NEMS Technologies