Highly efficient NO2 gas sensor based on sputter-grown nanocrystalline MoO3 thin films
Somdatta Singh, Ravikant Adalati, Prachi Gurawal, Gaurav Malik, Davinder Kaur, Ramesh Chandra
Abstract
This work explores an easy and efficient approach for developing NO 2 gas sensors based on one-step sputtered nanocrystalline molybdenum trioxide (nc-MoO 3 ). The sample’s morphology, crystallinity, and purity were analyzed using FESEM, XRD, and XPS, respectively. The MoO 3 thin film sensor displayed its highest sensor response (SR = R g /R a ) of ∼ 9.15 when exposed to 200 ppm of NO 2 gas at the optimal operating temperature of 300℃, with response and recovery times of about 114 and 106 s, respectively. The sensor also displayed high selectivity and stability. With the expeditious approach and outstanding performance, the sputtered bare MoO 3 thin films can be used for sparing NO 2 gas detection.