Self-elimination of phase noise in coherence scanning interferometry for nano-scale measurement
Long Ma, Yuan Zhao, Pei Xin, Sen Wu, Fengyu Yang
Topics & Concepts
InterferometryOpticsCoherence (philosophical gambling strategy)Noise (video)Phase (matter)White light interferometryPhase noiseScale (ratio)PhysicsRemote sensingMathematicsComputer scienceStatisticsGeologyArtificial intelligenceImage (mathematics)Quantum mechanicsOptical measurement and interference techniquesOptical Coherence Tomography ApplicationsAdvanced Measurement and Metrology Techniques