Litcius/Paper detail

Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography

Saaya Senzaki, Takao Okabe, Jun Taniguchi

2022Microelectronic Engineering15 citationsDOI

Topics & Concepts

MicrolensOpticsFocal lengthMaterials scienceLithographyElectron-beam lithographyLens (geology)ResistNanoimprint lithographyNext-generation lithographyX-ray lithographyFocal pointOptoelectronicsPhotolithographyUltravioletFabricationCardinal pointNanotechnologyPhysicsMedicinePathologyLayer (electronics)Alternative medicineAdvanced optical system designNanofabrication and Lithography TechniquesImage Processing Techniques and Applications
Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography | Litcius