Large-Scale Synthesis of Highly Uniform Silicon Nanowire Arrays Using Metal-Assisted Chemical Etching
Fedja J. Wendisch, Marcel Rey, Nicolas Vogel, Gilles R. Bourret
Abstract
MACE, relevant for both new and experienced researchers working with MACE.
Topics & Concepts
Materials scienceIsotropic etchingSiliconNanowireEtching (microfabrication)NanotechnologyDry etchingHomogeneity (statistics)Layer (electronics)OptoelectronicsStatisticsMathematicsNanowire Synthesis and ApplicationsAdvancements in Semiconductor Devices and Circuit DesignAnodic Oxide Films and Nanostructures