The role of AlN thickness in MOCVD growth of N-polar GaN
Yangfeng Li, Xiaotao Hu, Yimeng Song, Zhaole Su, Wenqi Wang, Haiqiang Jia, Wenxin Wang, Yang Jiang, Hong Chen
Topics & Concepts
Metalorganic vapour phase epitaxyMaterials scienceSapphireGallium nitrideDislocationNitrideTransmission electron microscopyChemical vapor depositionWide-bandgap semiconductorVicinalOptoelectronicsPolarEpitaxyCrystallographyLayer (electronics)Composite materialNanotechnologyOpticsChemistryLaserAstronomyPhysicsOrganic chemistryGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsZnO doping and properties